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  1. Multi-pocket electron beam evaporator

    The CHA is a multi-pocket electron beam evaporator. It is a high vacuum (10-6 Torr) e- beam evaporation system that can be used to deposit metals and dielectrics. The system can accommodate up to six crucibles at a time to allow multiple and sequential deposition. The planetary wafer holder of the system can hold up to 12 four inch wafers.
    research.engineering.ucdavis.edu/cnm2/wp-content/uploads/sites/11/2016/11/E-BeamEvaporator.pdf
    research.engineering.ucdavis.edu/cnm2/wp-content/uploads/sites/11/2016/11/E-…
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  4. CHA E-beam Evaporator | Center for Nano …

    WEBApr 4, 2023 · Used for depositing films of metals, oxides, nitrides and semiconductors, the CHA E-Beam Evaporator is the ideal tool for lift-off-layer patterning of most thin films.

  5. CHA MK40 E-beam Evaporator Training - YouTube

    WEBSep 12, 2017 · CHA MK40 E-beam Evaporator Training. This video covers a general operation of the CHA evaporator. ___ Disclaimer: This video is intended to serve as supplemental information and cannot...

  6. CHA E-Beam Evaporator | Core Facilities - Arizona …

    WEBThe CHA tool is an electron beam evaporation system utilizing a four pocket hearth for multi-layer film deposition. The tool is used to deposit aluminum (Al), nickel (Ni), platinum (Pt), and titanium (Ti) using a triple …

  7. CHA Solution E-Beam Evaporator - UCLA Nanolab

  8. CHA Mark 40 Evaporator (new) - UCLA Nanolab

  9. E-Beam 4 (CHA) - UCSB Nanofab Wiki

  10. CHA SEC-600 E-Beam Evaporator | Holonyak Micro

  11. CHA Metal Evaporator | Core Facilities - Arizona State …

    WEBThe CHA Metal Evaporator is a bell jar-style e-beam evaporator for metals. The turret consists of six pockets, each with a 15cc volume. The system is equipped with automatic deposition rate and thickness control, including …

  12. CHA E-Beam Evaporator #1 - Birck Nanotechnology Center Wiki

  13. CHA E-beam Evaporator 1 (dielectrics) - cleanroom.gatech.edu

  14. CHA E-Beam Evaporator #2 - Birck Nanotechnology Center Wiki

  15. E-Beam Metal Evaporator | Shared Materials Instrumentation …

  16. CHA Mark 50 E-beam Evaporator | CNF Users - Cornell University

  17. CHA E-beam Evaporator | NNCI

  18. Used E Beam Evaporators for sale. CHA Industries equipment

  19. Electron beam metal additive manufacturing: Defects formation …

  20. CHA E-Beam Evaporator 1 (dielectrics) - gatech.edu

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